A bottle-shaped trench capacitor having an expanded lower trench portion with an epi layer therein. The epi layer serves as the buried plate of the trench capacitor. A diffusion region surrounds the expanded lower trench portion to enhance the dopant concentration of the epi layer. The diffusion region...http://www.google.fr/patents/US6018174?utm_source=gb-gplus-shareBrevet US6018174 - Bottle-shaped trench capacitor with epi buried layer
Bottle-shaped trench capacitor with epi buried layer
