A high resolution objective lens assembly (20, 120, 220, 320) is implemented with refractive lens elements made of modified fused silica for operation at deep ultraviolet (DUV) wavelengths to reduce birefringence-caused image aberrations. The high resolution is achieved by an optical design that is characterized...http://www.google.fr/patents/US20060087725?utm_source=gb-gplus-shareBrevet US20060087725 - High resolution objective lens assembly
Numéro de demande: 10/537,681 Numéro de publication: US 2006/0087725 A1 Date de dépôt: 4 déc. 2003 Brevet délivré: US7450300 ( Date de délivrance 11 nov. 2008)
