A position detection apparatus for detecting a position of a mark on an object includes a camera which captures an image of the mark, an extraction section which extracts a plurality of edge positions of the mark based on a signal derived from the image of the mark, each of the edge positions being associated...http://www.google.fr/patents/US6925203?utm_source=gb-gplus-shareBrevet US6925203 - Position detection apparatus and exposure apparatus
Position detection apparatus and exposure apparatus
