The present invention provides a method and apparatus for high precision image metrology. A feature dimension from the image is determined by measuring corresponding features in the Fourier power spectrum of the image with substantially improved precision due to immunity from noise and system response....http://www.google.fr/patents/US6314212?utm_source=gb-gplus-shareBrevet US6314212 - High precision optical metrology using frequency domain interpolation
High precision optical metrology using frequency domain interpolation
