A receiver frame loads and unloads a batch of semiconductor wafers onto wafer holders in a wafer boat. The wafer holders extends continuously about the perimeter of an overlying wafer. The receiver frame is provided with a plurality of supporting arms which are immovably mounted to a vertically extending...http://www.google.fr/patents/US7033126?utm_source=gb-gplus-shareBrevet US7033126 - Method and apparatus for loading a batch of wafers into a wafer boat
Method and apparatus for loading a batch of wafers into a wafer boat
