A lithographic apparatus is disclosed. The apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also...http://www.google.fr/patents/US7145641?utm_source=gb-gplus-shareBrevet US7145641 - Lithographic apparatus, device manufacturing method, and device manufactured thereby
Lithographic apparatus, device manufacturing method, and device manufactured ...
