An electrostatic actuator includes a stationary element and a movable element. The stationary element has a surface which faces a surface of the moving element. Both the surface of the stationary element and the surface of the moving element have electrode lines disposed thereon, including a first set...http://www.google.fr/patents/US5055731?utm_source=gb-gplus-shareBrevet US5055731 - High-speed two-dimensional electrostatic actuator
