A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so...http://www.google.fr/patents/US7067807?utm_source=gb-gplus-shareBrevet US7067807 - Charged particle beam column and method of its operation
Charged particle beam column and method of its operation
