Firing process and apparatus for uniformly heat-treating a substrate having a film-forming composition thereon, wherein the substrate is subjected to a first soaking step in which the substrate is held for a predetermined time in a first heating chamber whose temperature is maintained at a first value,...http://www.google.fr/patents/US5980991?utm_source=gb-gplus-shareBrevet US5980991 - Process for heat-treating substrate having film-forming composition thereon
Process for heat-treating substrate having film-forming composition thereon