Noble metal plating on a preexisting seed layer is used in the fabrication of electrodes for DRAM and FRAM. The plating may be spatially selective or nonselective. In the nonselective case, a blanket film is first plated and then patterned after deposition by spatially selective material removal. In...http://www.google.fr/patents/US5789320?utm_source=gb-gplus-shareBrevet US5789320 - Plating of noble metal electrodes for DRAM and FRAM
Plating of noble metal electrodes for DRAM and FRAM
