A stage assembly and support system are provided to stabilize a stage base, such as a wafer stage base or a reticle stage base, minimizing forces transmitted from the stage assembly to a stationary surface, such as the ground, and thereby preventing vibration of other parts or systems in a wafer manufacturing...http://www.google.fr/patents/US6987558?utm_source=gb-gplus-shareBrevet US6987558 - Reaction mass for a stage device
