Low coherence illumination is used in interferometric methods and systems which exhibit improved precision and flexibility. According to a first aspect of the invention, both a phase shifting interferometry (PSI) analysis and a scanning white light interferometry (SWLI) analysis are applied to a single...http://www.google.fr/patents/US5953124?utm_source=gb-gplus-shareBrevet US5953124 - Interferometric methods and systems using low coherence illumination
Interferometric methods and systems using low coherence illumination
