An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using at least one of a phase shifting plate and a difference in step height. A method corresponding to the apparatus for patterning a work piece. A method of...http://www.google.fr/patents/US7110159?utm_source=gb-gplus-shareBrevet US7110159 - Method and apparatus for patterning a workpiece and methods of manufacturing the same
Method and apparatus for patterning a workpiece and methods of manufacturing ...
