Integrated semiconductor-on-insulator (SOI) sensors and circuits which are electrostatically bonded to a support substrate, such as glass or an oxidized silicon wafer, are disclosed. The SOI sensors and SOI circuits are both formed using a novel fabrication process which allows multiple preformed and...http://www.google.fr/patents/US5343064?utm_source=gb-gplus-shareBrevet US5343064 - Fully integrated single-crystal silicon-on-insulator process, sensors and circuits
Fully integrated single-crystal silicon-on-insulator process, sensors and ...
