The present invention provides a method of enabling measurement access to small integrated circuit features that comprises selecting a feature of an integrated circuit on a wafer and providing access to the selected feature by removing a portion of the integrated circuit adjacent to the feature, thereby...http://www.google.fr/patents/US6548314?utm_source=gb-gplus-shareBrevet US6548314 - Method for enabling access to micro-sections of integrated circuits on a wafer
Method for enabling access to micro-sections of integrated circuits on a wafer
