A monolithic capacitance-type microstructure includes a semiconductor substrate, a plurality of posts extending from the surface of the substrate, a bridge suspended from the posts, and an electrically-conductive, substantially stationary element anchored to the substrate. The bridge includes an element...http://www.google.fr/patents/US6009753?utm_source=gb-gplus-shareBrevet US6009753 - Monolithic micromechanical apparatus with suspended microstructure
Monolithic micromechanical apparatus with suspended microstructure
