Methods for making a micromachined device (e.g. an microoptical submount) having positive features (extending up from a device surface) and negative features (extending into the device surface). The present techniques locate the postive feature and negative features according to a single mask step. In...http://www.google.fr/patents/US6627096?utm_source=gb-gplus-shareBrevet US6627096 - Single mask technique for making positive and negative micromachined features on a substrate
Single mask technique for making positive and negative micromachined ...
