The preferred embodiment of the present invention overcomes the limitations of the prior art by providing a method to form unlinked features using hybrid resist. The method uses a trim process in order to trim the linking features from the "loops" formed by the hybrid resist. This allows the method to...http://www.google.fr/patents/US6007968?utm_source=gb-gplus-shareBrevet US6007968 - Method for forming features using frequency doubling hybrid resist and device formed thereby
Method for forming features using frequency doubling hybrid resist and ...
