The statistical process control (SPC) subsystem is the heart of the data collection and process control system for semiconductor manufacturing in the various embodiments as disclosed herein. SPC is responsible for performing calculations to generate statistics on collected measurement data, applying...http://www.google.fr/patents/US6727106?utm_source=gb-gplus-shareBrevet US6727106 - System and software for statistical process control in semiconductor manufacturing and method thereof
System and software for statistical process control in semiconductor ...
