A film heater and thick-film electrode pads are provided on one main surface of a heat-resistant insulating substrate and are connected by through holes to a metal oxide semiconductor film on the tail surface. Pads are made of a gold alloy such as Au--Pt and connected to leads of Pt--W,...http://www.google.fr/patents/US5837886?utm_source=gb-gplus-shareBrevet US5837886 - Gas sensor
