The present invention relates generally to a new integrated Vacuum Microelectronic Device (VMD) and a method for making the same. Vacuum Microelectronic Devices require several unique three dimensional structures: a sharp field emission tip, accurate alignment of the tip inside a control grid structure...http://www.google.fr/patents/US5203731?utm_source=gb-gplus-shareBrevet US5203731 - Process and structure of an integrated vacuum microelectronic device
Process and structure of an integrated vacuum microelectronic device
