In a phase shift mask and a method for repairing a defect of a phase shift mask according to the present invention, a phase shifter defective portion in which a portion of a phase shifter portion is missing is formed in a region including a boundary between a light transmitting portion and a phase shifter...http://www.google.fr/patents/US5464713?utm_source=gb-gplus-shareBrevet US5464713 - Phase shift mask and method for repairing a defect of a phase shift mask
Phase shift mask and method for repairing a defect of a phase shift mask
