A plurality of capacitors each of which has a first and a second electrode. A plurality of first switches is connected between the first electrodes of the plurality of capacitors and a first power supply. A plurality of second switches is connected between the second electrodes of the plurality of capacitors...http://www.google.fr/patents/US8013667?utm_source=gb-gplus-shareBrevet US8013667 - Voltage generating circuit for electrostatic MEMS actuator
Voltage generating circuit for electrostatic MEMS actuator
