An intensity distribution display method of displaying a intensity distribution of electromagnetic waves or charged particle beams fallen on a sample, is characterized by comprising the step of displaying the intensity distribution with the use of contour lines defined by Ie/(1+a.multidot.n/100), where...http://www.google.fr/patents/US5861866?utm_source=gb-gplus-shareBrevet US5861866 - LSI mask pattern edit apparatus with contour line intensity distribution display method of resolution for lithography
LSI mask pattern edit apparatus with contour line intensity distribution ...
