An exposure apparatus (EX) is an apparatus which exposes a substrate (P) by irradiating exposure light (EL) onto the substrate (P) via a projection optical system (PL) and a liquid (1). The exposure apparatus (EX) has a substrate table (PT) for holding the substrate (P), and a plate member (30) having...http://www.google.fr/patents/US8054447?utm_source=gb-gplus-shareBrevet US8054447 - Exposure apparatus, exposure method, method for producing device, and optical part
Exposure apparatus, exposure method, method for producing device, and ...
