An array of individually controllable elements, comprising a plurality of control areas consisting of a plurality of rows of reflectors. Alternate rows of reflectors are actuated in a common manner such that the control areas function as a grating to provide a control element that can be used as a diffractive...http://www.google.fr/patents/US7304718?utm_source=gb-gplus-shareBrevet US7304718 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
