In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency...http://www.google.fr/patents/US6183816?utm_source=gb-gplus-shareBrevet US6183816 - Method of fabricating the coating
