A method for fabricating chalcogenide materials on substrates, which reduces and/or eliminates agglomeration of materials on the chalcogenide materials; and system and devices for performing the method, semiconductor devices so produced, and machine readable media containing the method. One method disclosed...http://www.google.fr/patents/US6949453?utm_source=gb-gplus-shareBrevet US6949453 - Agglomeration elimination for metal sputter deposition of chalcogenides
Agglomeration elimination for metal sputter deposition of chalcogenides
