A very high temperature microbeam sensor of a resonant integrated microstructure having an electrostatic beam driver and an optical fiber pick-up for sensed light from the beam. The high temperature sensor has no components that are vulnerable to temperatures up to 600 degrees C. Associated components...http://www.google.fr/patents/US6031944?utm_source=gb-gplus-shareBrevet US6031944 - High temperature resonant integrated microstructure sensor
High temperature resonant integrated microstructure sensor
