A membrane-actuated charge controlled mirror (CCM) that exhibits increased deflection range, reduced beam current and improved electrostatic stability is fabricated using a combination of flat panel manufacturing along with traditional MEMS techniques. More specifically, a unique combination of five...http://www.google.fr/patents/US6123985?utm_source=gb-gplus-shareBrevet US6123985 - Method of fabricating a membrane-actuated charge controlled mirror (CCM)
Method of fabricating a membrane-actuated charge controlled mirror (CCM)
