In a semiconductor element comprising microcrystalline semiconductor, a semiconductor junction is provided within a microcrystal grain. Further, in a semiconductor element comprising microcrystalline semiconductor, providing microcrystal grains of different grain diameters as a mixture to form a semiconductor...http://www.google.fr/patents/US6635899?utm_source=gb-gplus-shareBrevet US6635899 - Semiconductor element having microcrystalline grains and manufacturing method thereof
Semiconductor element having microcrystalline grains and manufacturing ...
