A lithographic apparatus including an illumination system for providing a beam of radiation and a support structure for supporting a patterning device. The patterning device serving to impart the beam with a pattern in its cross-section. The apparatus also having a substrate table for holding a substrate...http://www.google.fr/patents/US7106416?utm_source=gb-gplus-shareBrevet US7106416 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
