Method and apparatus are disclosed for making integrated optical circuits. A waveguide in the form of a thin layer of dielectric material is modified as to its coherent radiation transmitting properties by electron beam impingement thereon so as to modulate coherent radiation by mode conversion and mode...http://www.google.fr/patents/US4085501?utm_source=gb-gplus-shareBrevet US4085501 - Method for fabrication of integrated optical circuits
Method for fabrication of integrated optical circuits
