A method of treating substrate surfaces with the aid of a plasma such as etching, deposition etc. In the practice of the method, the plasma flows from its place of generation to the treatment-chamber, and in which method the plasma-generator is flushed through with a flushing gas. Preferably, and firstly...http://www.google.fr/patents/US4871580?utm_source=gb-gplus-shareBrevet US4871580 - Method of treating surfaces of substrates with the aid of a plasma
Method of treating surfaces of substrates with the aid of a plasma
