A method of manufacturing an optical waveguide device. The method involves removing a portion of an upper cladding layer 110 from above a waveguide 106 and depositing a temporary spacer layer 114 in place of the removed upper cladding 110. A metal membrane 116 is deposited and patterned over the...http://www.google.fr/patents/US5721801?utm_source=gb-gplus-shareBrevet US5721801 - Membrane optical waveguide device and method of fabrication
Membrane optical waveguide device and method of fabrication
