Disclosed is a semiconductor device having a structure in which even if a misalignment occurs an upper trench and a connection hole, that is, the upper trench is offset from the connection hole, it is possible to suppress a reduction in contact area between an interconnection material and a connection...http://www.google.fr/patents/US5981377?utm_source=gb-gplus-shareBrevet US5981377 - Semiconductor device with improved trench interconnected to connection plug mating and method of making same
Semiconductor device with improved trench interconnected to connection plug ...
