In a method of cleaning and refurbishing a process chamber component having a metal coating having a surface thereon, the surface of the metal coating is immersed in an acidic solution to remove at least a portion of the process deposits from the surface. Thereafter, the surface of the metal coating...http://www.google.fr/patents/US20040099285?utm_source=gb-gplus-shareBrevet US20040099285 - Method of cleaning a coated process chamber component
Method of cleaning a coated process chamber component
Numéro de demande: 10/304,535 Numéro de publication: US 2004/0099285 A1 Date de dépôt: 25 nov. 2002 Brevet délivré: US6902628 ( Date de délivrance 7 juin 2005)
