A microwave plasma processing apparatus 100 includes a processing chamber 10, a waveguide 22, a slot antenna 23, a dielectric member 24, a first cooling unit 60 and a second cooling unit 80. As a liquid coolant flows through a flow passage 61 disposed at the slot antenna 23, the dielectric member 24...http://www.google.fr/patents/US20060225656?utm_source=gb-gplus-shareBrevet US20060225656 - Plasma processing apparatus, slot antenna and plasma processing method
Plasma processing apparatus, slot antenna and plasma processing method
