A micro-electro-mechanical system (MEMS) optical switch actuator and method for fabricating the actuator provide an anchor assembly that functions as a second electrode. The actuator has a reflective element assembly and a first electrode assembly for moving the reflective element assembly from a first...http://www.google.fr/patents/US20030210851?utm_source=gb-gplus-shareBrevet US20030210851 - MEMS OPTICAL SWITCH ACTUATOR
Numéro de demande: 09/728,474 Numéro de publication: US 2003/0210851 A1 Date de dépôt: 1 déc. 2000 Brevet délivré: US6647171 ( Date de délivrance 11 nov. 2003)
