A process and apparatus that may be used for the production of diamond and doped diamond films at high rates by activated reactive vapor deposition. Carbon is evaporated in a vacuum chamber in the presence of atomic hydrogen containing plasma to form diamond precursors which then deposit on a substrate...http://www.google.fr/patents/US4816291?utm_source=gb-gplus-shareBrevet US4816291 - Process for making diamond, doped diamond, diamond-cubic boron nitride composite films
Process for making diamond, doped diamond, diamond-cubic boron nitride ...
