A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that...http://www.google.fr/patents/US7405584?utm_source=gb-gplus-shareBrevet US7405584 - Prober and probe contact method
