The thicknesses of the thin film components of a sample that comprises plural thin films deposited on top of each other on a substrate are simultaneously measured by an x-ray-fluorescence system. Incident x-rays excite x-ray fluorescence in the sample. Detection of the excited fluorescence is enhanced...http://www.google.fr/patents/US4162528?utm_source=gb-gplus-shareBrevet US4162528 - X-ray-fluorescence measurement of thin film thicknesses
X-ray-fluorescence measurement of thin film thicknesses
