Apparatus and methods for inspecting a workpiece are provided. According to one embodiment, a method for inspecting a workpiece comprises illuminating at least a portion of the workpiece with at least one illumination beam and capturing at least one image including at least on line signature formed by...http://www.google.fr/patents/US7495758?utm_source=gb-gplus-shareBrevet US7495758 - Apparatus and methods for two-dimensional and three-dimensional inspection of a workpiece
Apparatus and methods for two-dimensional and three-dimensional inspection ...
