A method for manufacturing a thin film transistor having a crystalline silicon layer as an active layer comprises the steps of disposing a solution containing a catalyst for promoting a crystallization of silicon in contact with an amorphous silicon film, crystallizing the amorphous silicon at a relatively...http://www.google.fr/patents/US5543352?utm_source=gb-gplus-shareBrevet US5543352 - Method for manufacturing a semiconductor device using a catalyst
Method for manufacturing a semiconductor device using a catalyst
