A technique for forming a film of material (12) from a donor substrate (10). The technique has a step of introducing energetic particles (22) through a surface of a donor substrate (10) to a selected depth (20) underneath the surface, where the particles have a relatively high concentration to define...http://www.google.fr/patents/US6013563?utm_source=gb-gplus-shareBrevet US6013563 - Controlled cleaning process
