A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base forming a gap therebetween; and a spring-like structure disposed between the top plate and the lower portion...http://www.google.fr/patents/US7564172?utm_source=gb-gplus-shareBrevet US7564172 - Micro-electro-mechanical transducer having embedded springs
Micro-electro-mechanical transducer having embedded springs
