A monolithic thin film resonator, lattice filter including spaced apart strips of a conductive film positioned on a substrate so as to define a first set of I/O terminals, a layer of piezoelectric material positioned on the conductive film, and spaced apart conductive strips of a conductive film...http://www.google.fr/patents/US5692279?utm_source=gb-gplus-shareBrevet US5692279 - Method of making a monolithic thin film resonator lattice filter
Method of making a monolithic thin film resonator lattice filter
