Disclosed herein is a method for manufacturing semiconductor device and a method and apparatus for processing detected defect data, making it possible to quickly infer or determine a process and related manufacturing equipment that causes defects in a fabrication line of semiconductor devices, take remedy...http://www.google.fr/patents/US20030138978?utm_source=gb-gplus-shareBrevet US20030138978 - Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data
Method for manufacturing semiconductor devices and method and its apparatus ...
Numéro de demande: 10/348,747 Numéro de publication: US 2003/0138978 A1 Date de dépôt: 21 janv. 2003 Brevet délivré: US6841403 ( Date de délivrance 11 janv. 2005)
