An optical inspection system has a topology sensing assembly. A height detector detects whether a region of a circuit has a height different from a height of the surface, and provides height data. A topology representation of the circuit, based on the height data, forms the basis for a reduced representation...http://www.google.fr/patents/US6654115?utm_source=gb-gplus-shareBrevet US6654115 - System and method for multi-dimensional optical inspection
System and method for multi-dimensional optical inspection
