A writing apparatus includes a unit storing writing data, a unit which acquires pattern information on patterns defined in the data, a unit which generates a table where each pattern information corresponds to a number of times each pattern information is used, for each predetermined region, a unit which...http://www.google.fr/patents/US7926007?utm_source=gb-gplus-shareBrevet US7926007 - Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process
Writing apparatus, writing data conversion method, and computer-readable ...
